VEGA SEM

Overview

The VEGA series was designed with respect to a wide range of SEM applications and needs in todays research and industry. After 10 years of continuous development VEGA has matured to its 3rd generation. This new generation provides its users with the advantages of the latest technology, such as new improved high-performance electronics for faster image acquisition, an ultra-fast scanning system with compensation for static and dynamic image aberrations or built-in scripting for user-defined applications, all while maintaining the best price-to-performance ratio.

High Resolution Imaging with LaB6 Emitter

TESCAN offers the LaB6 lanthanum hexaboride electron source as an option, which can be classified as somewhere in-between the Schottky emitter and a tungsten heated filament. The benefit of LaB6 is a relatively stable electron-emitting source compared to those of FE SEMs, providing higher currents at lower cathode temperatures compared to tungsten emitters. This means greater brightness, a reasonably improved resolution over the whole range of accelerating voltages and a longer cathode lifetime. Due to the higher emission current, the LaB6 emitter is the right choice for analytical applications where large beam currents are needed.

Modern Optics

A unique four-lens Wide Field Optics design offering a variety of working and displaying modes.
The proprietary Intermediate Lens (IML) that works as an aperture changer changes the effective final aperture electromagnetically.
The use of premium materials for the lenses and coils enables an ultra-fast imaging rate down to 20 ns/pixel with minimized dynamic distortion effects.
Newly implemented In-Flight Beam Tracing for high precision real-time computation of optical parameters.
Column design without any mechanical centering elements enables fully automated column set-up and alignment.
Unique live stereoscopic imaging using advanced 3D Beam Technology opens up the micro and nano-world for an amazing 3D experience and 3D navigation.

Rapid Maintenance

Keeping the microscope in peak condition is now easy and requires a minimum of microscope downtime. Every detail has been carefully designed to maximize microscope performance and minimize operator effort.

Automated Procedures

Filament heating and alignment of the gun for optimal beam performance is done automatically with just one click. There are many other procedures which reduce the operators tune-up time significantly, enable automated manipulator navigation and automated analyses. Built-in scripting language (Python) enables access to most software features, including complete microscope control, stage control, image acquisition, processing and analysis. Scripting enables users to define their own automatic procedures.

User-Friendly Software and Software Tools

Multi-user environment is localized in many languages.
Four levels of user expertise/rights, including an EasySEM^TM mode for quick routine investigations
Image management and report creation
Built-in self-diagnostics for system readiness checks
Network operations and remote access/diagnostics
Modular software architecture enables several extensions to be attached.
Basic set of plug-ins, such as Measurement, Image Processing, Object Area, available as standard
Several optional modules or dedicated applications optimized for automatic sample examination procedures, such as Morphology and Particle Analysis or 3D surface reconstruction, etc.

VEGA3 SB

A fully PC controlled SEM with conventional tungsten heated cathode intended both for high vacuum as well as for low vacuum operations.

VEGA3 SB – EasyProbe

The VEGA3 SBU – EasyProbe is a compact scanning electron microscope (SEM) fully integrated with a selected energy dispersive X-ray microanalyser (EDX). Superior imaging quality, high level of automation, easy usage and quick quantitative elemental results directly in the live image are among the characteristic features of the instrument.